Vacuum Turbo Pumps RFP

Description: Operations: The TMPS is required to feature an integrated, oil-free, benchtop pumping system combining a turbomolecular high-vacuum pump, a dry scroll/backing pump, and an integrated system controller. The acquisition shall also contain a separate variable leak valve. The TMPS shall be a fully integrated, self-contained "plug-and-play" unit. The roughing and backing operations shall not require physical pumping or oil-sealed backing pumps to achieve high-vacuum operation. Users are expected to interact solely with the system's main interface or display panel during operation. The connection on the top of the pumping system shall be an ISO 100 Flange (ISO-LF DN 100). Range and Pumping Speed: The TMPS shall be capable of evacuating chambers and measuring pressure across the following parameters: The High-Vacuum Pump Speed shall be at least 215 L/s for Nitrogen; The Vacuum Pressure shall obtain a vacuum of 1*10^-9 mbar; The Compression Ratio for Nitrogen shall be greater than 1*10^-11. See attached file.